Confocal surface profiling utilizing chromatic aberration
Abstract A new method for surface profiling in the confocal microscope utilizing chromatic aberration is presented. An expression for the integrated spectral intensity in the new profilometer is derived and chromatic aberration in the confocal microscope is explained. Estimates of the minimum resolvable depth and the maximum depth that can be profiled are given utilizing a ratiometric signal detection scheme. Examples of ratio images illustrating the new surface profiling technique are presented, showing the scheme to be both simple to implement and effective.